JPH0371624U - - Google Patents
Info
- Publication number
- JPH0371624U JPH0371624U JP13238789U JP13238789U JPH0371624U JP H0371624 U JPH0371624 U JP H0371624U JP 13238789 U JP13238789 U JP 13238789U JP 13238789 U JP13238789 U JP 13238789U JP H0371624 U JPH0371624 U JP H0371624U
- Authority
- JP
- Japan
- Prior art keywords
- support
- semiconductor manufacturing
- manufacturing apparatus
- grooves
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13238789U JPH0371624U (en]) | 1989-11-14 | 1989-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13238789U JPH0371624U (en]) | 1989-11-14 | 1989-11-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0371624U true JPH0371624U (en]) | 1991-07-19 |
Family
ID=31679846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13238789U Pending JPH0371624U (en]) | 1989-11-14 | 1989-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0371624U (en]) |
-
1989
- 1989-11-14 JP JP13238789U patent/JPH0371624U/ja active Pending
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